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Proceedings Paper

Precision interferometry in less than ideal environments
Author(s): James C. Wyant
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Paper Abstract

Interferometry can be extremely useful for testing optical components and optical systems as well as the metrology of many other components, such as the flatness and roughness of hard disk drive platters, the shape of magnetic recording heads and machined parts, and the deformations of diffuse surfaces. To make good use of interferometric data the data must be analyzed by a computer to determine if the surface shape is correct or not and if it is not correct what has to be done to correct it and how well the surface being evaluated will perform if it is not corrected. Until recently a major limitation of interferometry for precision metrology was the sensitivity to the environment.

Paper Details

Date Published: 2 August 2010
PDF: 2 pages
Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900J (2 August 2010); doi: 10.1117/12.863613
Show Author Affiliations
James C. Wyant, College of Optical Sciences, The Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 7790:
Interferometry XV: Techniques and Analysis
Catherine E. Towers; Joanna Schmit; Katherine Creath, Editor(s)

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