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Proceedings Paper

Mask phase and transmission variation effects on wafer critical dimensions for nodes 65nm and 45nm
Author(s): F. Dufaye; S. Gough; F. Sundermann; V. Farys; H. Miyashita; L. Sartelli; F. Perissinotti; U. Buttgereit; S. Perlitz; R. Birkner
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Paper Abstract

In microelectronic industry, mainly from the 65nm node, phase shift photomasks (PSM) are increasingly used for critical layers, optical properties of the shifter (MoSi) giving a better control of critical dimensions (CD) in photoresist. Fabusers and maskshops have committed on specifications that restrict phase and transmission variations within certain limits. The goal of this study is to validate and/or update these previously admitted limits. A specific test reticle has been jointly designed with several structures representative of 65nm and 45nm nodes and then manufactured with a specific process in order to voluntarily degrade the phase and transmission uniformity within the mask. Knowing all CD and their related phase and transmission on mask, CD variations seen on wafers have been directly linked to phase and transmission variations. In parallel, rigorous simulations have been performed using Panoramic software in order to predict effects of phase and transmission variations on wafer. This reticle has been also used for early studies to evaluate the impact of phase and transmission variations on optical proximity correction (OPC) model.

Paper Details

Date Published: 15 May 2010
PDF: 13 pages
Proc. SPIE 7545, 26th European Mask and Lithography Conference, 75450M (15 May 2010); doi: 10.1117/12.863147
Show Author Affiliations
F. Dufaye, STMicroelectronics (France)
S. Gough, STMicroelectronics (France)
F. Sundermann, STMicroelectronics (France)
V. Farys, STMicroelectronics (France)
H. Miyashita, Dai Nippon Photomasks Europe (Italy)
L. Sartelli, Dai Nippon Photomasks Europe (Italy)
F. Perissinotti, Dai Nippon Photomasks Europe (Italy)
U. Buttgereit, Carl Zeiss SMS GmbH (Germany)
S. Perlitz, Carl Zeiss SMS GmbH (Germany)
R. Birkner, Carl Zeiss SMS GmbH (Germany)

Published in SPIE Proceedings Vol. 7545:
26th European Mask and Lithography Conference
Uwe F.W. Behringer; Wilhelm Maurer, Editor(s)

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