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Proceedings Paper

The organization of carbon nanotube and silicon nanowires using lateral-type porous anodic alumina
Author(s): K. H. Kim; E. Lefeuvre; A. Gohier; M. Chatelet; D. Pribat; B. S. Kim; C. S. Cojocaru
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Paper Abstract

We successfully synthesized organized Carbon nanotubes (CNTs) and Silicon Nanowires (SiNWs) arrays using LPAA. This approach can yield very dense assemblies of nano-objects with a planar-type organization compatible with existing tools inherited from advanced microelectronic processes and adapted to electronic devices as field effect transistors, interconnects, sensors, etc. CNTs/SiNWs were grown using Hot-filament Chemical Vapor Deposition (HFCVD) within lateral-type porous anodic alumina. We demonstrate that the pulsed electrodeposition of metal nanoparticles to be further used as catalysts inside the membranes requires specific thinning and pore widening process to remove the alumina barrier layer located at the bottom of the pores. The growth of CNTs was found to strongly depend on the electrodeposition conditions as well as on the CVD parameters. In addition, we found that introducing atomic hydrogen (generated using a hot-wire) as etching agent was essential to prevent parasitic carbon/silicon deposition on the surface of PAA or on the wall of pores and to improve CNTs/NWs growth. Such organized CNTs/SiNWs arrays are very promising as advanced microelectronic devices and their potentiality for photosensing applications were investigated.

Paper Details

Date Published: 25 August 2010
PDF: 9 pages
Proc. SPIE 7761, Carbon Nanotubes, Graphene, and Associated Devices III, 776109 (25 August 2010); doi: 10.1117/12.863114
Show Author Affiliations
K. H. Kim, Lab. de Physique des Interfaces des Couches Minces, CNRS, Ecole Polytechnique (France)
E. Lefeuvre, Lab. de Physique des Interfaces des Couches Minces, CNRS, Ecole Polytechnique (France)
A. Gohier, Lab. de Physique des Interfaces des Couches Minces, CNRS, Ecole Polytechnique (France)
M. Chatelet, Lab. de Physique des Interfaces des Couches Minces, CNRS, Ecole Polytechnique (France)
D. Pribat, Lab. de Physique des Interfaces des Couches Minces, CNRS, Ecole Polytechnique (France)
Sungkyunkwan Univ. (Korea, Republic of)
B. S. Kim, Samsung Electronics (Korea, Republic of)
C. S. Cojocaru, Lab. de Physique des Interfaces des Couches Minces, CNRS, Ecole Polytechnique (France)


Published in SPIE Proceedings Vol. 7761:
Carbon Nanotubes, Graphene, and Associated Devices III
Didier Pribat; Young-Hee Lee; Manijeh Razeghi, Editor(s)

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