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Proceedings Paper

Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors
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Paper Abstract

Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.

Paper Details

Date Published: 2 August 2010
PDF: 12 pages
Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900L (2 August 2010); doi: 10.1117/12.862427
Show Author Affiliations
Ping Zhou, College of Optical Sciences, The Univ. of Arizona (United States)
James Burge, College of Optical Sciences, The Univ. of Arizona (United States)
Chunyu Zhao, College of Optical Sciences, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 7790:
Interferometry XV: Techniques and Analysis
Catherine E. Towers; Joanna Schmit; Katherine Creath, Editor(s)

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