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Proceedings Paper

Optical metrology and optical non-destructive testing from the perspective of object characteristics
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Paper Abstract

High precision optical metrology may be viewed from the perspective of the relevant object properties for optical measurement such as microstructure, surface gradient and geometrical complexity. We discuss high precision measurement methods and compare their suitability with respect to these object properties. We emphasize reflectometry and shearography as examples of two interesting techniques particularly suited for high precision optical metrology and extend the discussion to optical non destructive testing (NDT). In this context, reflectometry and shearography appear to be interesting techniques suitable for both optical metrology and NDT. We finally discuss the unique features of laser ultrasonic for NDT.

Paper Details

Date Published: 2 August 2010
PDF: 15 pages
Proc. SPIE 7791, Interferometry XV: Applications, 779102 (2 August 2010); doi: 10.1117/12.862266
Show Author Affiliations
Ralf B. Bergmann, Bremer Institut für angewandte Strahltechnik (Germany)
T. Bothe, Bremer Institut für angewandte Strahltechnik (Germany)
C. Falldorf, Bremer Institut für angewandte Strahltechnik (Germany)
P. Huke, Bremer Institut für angewandte Strahltechnik (Germany)
M. Kalms, Bremer Institut für angewandte Strahltechnik (Germany)
C. von Kopylow, Bremer Institut für angewandte Strahltechnik (Germany)


Published in SPIE Proceedings Vol. 7791:
Interferometry XV: Applications
Cosme Furlong; Christophe Gorecki; Erik L. Novak, Editor(s)

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