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Proceedings Paper

Laser beam homogenization, splitting and three spot image formation: system design, analysis and testing
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Paper Abstract

Beam shaping technology can greatly improve laser process efficiency by enabling parallel processes and increasing precision, quality and process stability. This paper outlines a system design, optical code analysis and the bench testing of a patented [1,2] laser beam homogenization and imaging system using prism beam splitting to produce a three spot array. The system uses a beam integrator to produce a rectangular spot that is split into three beams by two prisms. A second set of prisms directs the two outer beams onto an imaging lens and sets the pitch of the virtual spots. These beams, with the central beam, are imaged to form three spots with the required pitch. A prototype system design was developed for two approaches based on the first principles. The prototype system parameters were adjusted to minimize the requirements of the elements such as the imaging lens and prisms. Since the two systems require a relatively fast imaging lens, and there are aberrations associated with the prisms, a detailed optical design was conducted to determine the performance of the two approaches and to assess the complexity of the imaging lens. This paper will present the various positive and negative attributes of the two beam shaper designs within an optical system and how the best design was selected for prototyping and bench testing. Various data will be presented at each stage of design evaluation to the final bench test.

Paper Details

Date Published: 16 August 2010
PDF: 17 pages
Proc. SPIE 7789, Laser Beam Shaping XI, 77890A (16 August 2010); doi: 10.1117/12.862171
Show Author Affiliations
Todd Lizotte, Hitachi Via Mechanics (USA), Inc. (United States)
Fred Dickey, FMD Consulting LLC (United States)
Dan Brown, Optosensors Technology, Inc. (United States)

Published in SPIE Proceedings Vol. 7789:
Laser Beam Shaping XI
Andrew Forbes; Todd E. Lizotte, Editor(s)

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