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Proceedings Paper

Design, technology, and signal processing for DOE-based microinterferometer array applied in new generation M(O)EMS test equipment
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Paper Abstract

The paper introduces different approaches to overcome the large ratio between wafer size and feature size in micro production. The EU-project SMARTIEHS develops a new concept for high volume M(O)EMS testing. The design of the test station is presented and the advancements compared to the state of the art are introduced within the following fields: micro-optical laser interferometer (LI) design, DOE-based microinterferometer production, smart-pixel camera and signal processing for resonance frequency and vibration amplitude distribution determination. The first experiments performed at LI demonstrator are also reported.

Paper Details

Date Published: 2 August 2010
PDF: 11 pages
Proc. SPIE 7791, Interferometry XV: Applications, 779103 (2 August 2010); doi: 10.1117/12.862170
Show Author Affiliations
M. Kujawinska, Warsaw Univ. of Technology (Poland)
M. Józwik, Warsaw Univ. of Technology (Poland)
A. Styk, Warsaw Univ. of Technology (Poland)
U. Zeitner, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
A. Røyset, SINTEF (Norway)
S. Beer, CSEM SA . (Switzerland)
R. Moosburger, Heliotis Inc. (Switzerland)
C. Gorecki, FEMTO, CNRS, Univ. de Franche-Comté (France)
K. Gastinger, SINTEF (Norway)


Published in SPIE Proceedings Vol. 7791:
Interferometry XV: Applications
Cosme Furlong; Christophe Gorecki; Erik L. Novak, Editor(s)

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