Share Email Print

Proceedings Paper

Non-contact stiffness measurement of a suspended single walled carbon nanotube devices
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A new nanoscale electric field sensor was developed for studying triboelectric charging in terrestrial and Martian dust devils. This sensor is capable to measure the large electric fields for large dust devils without saturation. However, to quantify the electric charges and the field strength it is critical to calibrate the mechanical stiffness of the sensor devices. We performed a technical feasibility study of the Nano E-field Sensor stiffness by a non-contact stiffness measurement method. The measurement is based on laser Doppler vibrometer measurement of the thermal noise due to energy flunctuations in the devices. The experiment method provides a novel approach to acquire data that is essential in analyzing the quantitative performance of the E-field Nano Sensor. To carry out the non-contact stiffness measurement, we fabricated a new Single-Walled Carbon Nanotube (SWCNT) E-field sensor with different SWCNTs suspension conditions. The power spectra of the thermal induced displacement in the nano E-field sensor were measured at the accuracy of picometer. The power spectra were then used to derive the mechanical stiffness of the sensors. Effect of suspension conditions on stiffness and sensor sensitivty was discussed. After combined deformation and resistivity measurement, we can compare with our laboratory testing and field testing results. This new non-contact measurement technology can also help to explore to other nano and MEMS devices in the future.

Paper Details

Date Published: 27 August 2010
PDF: 10 pages
Proc. SPIE 7764, Nanoengineering: Fabrication, Properties, Optics, and Devices VII, 77640K (27 August 2010); doi: 10.1117/12.861289
Show Author Affiliations
Yun Zheng, NASA Goddard Space Flight Ctr. (United States)
Chanmin Su, Veeco Instruments Inc. (United States)
Stephanie Getty, NASA Goddard Space Flight Ctr. (United States)

Published in SPIE Proceedings Vol. 7764:
Nanoengineering: Fabrication, Properties, Optics, and Devices VII
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

© SPIE. Terms of Use
Back to Top