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Proceedings Paper

Present status of upgraded long trace profiler for characterization of high-precision x-ray mirrors at SPring-8
Author(s): Y. Senba; H. Kishimoto; H. Ohashi; H. Yumoto; S. Goto; T. Ishikawa
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Paper Abstract

The long trace profiler (LTP) at SPring-8 has been fully upgraded in-house. The environmental temperature and air pressure supplied to the air bearing were stabilized. An intensity-stabilized He-Ne laser, air-bearing slider, optical elements, and a detector were replaced to improve the stability and resolution of slope measurement. The newly installed device, a motorized swivel stage, enables automatic stitching measurements. Two steep mirrors whose range of slope is wider than the angular range of the LTP were measured by using the stitching technique.

Paper Details

Date Published: 1 September 2010
PDF: 9 pages
Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 780104 (1 September 2010); doi: 10.1117/12.861021
Show Author Affiliations
Y. Senba, Japan Synchrotron Radiation Research Institute (Japan)
H. Kishimoto, Japan Synchrotron Radiation Research Institute (Japan)
H. Ohashi, Japan Synchrotron Radiation Research Institute (Japan)
H. Yumoto, Japan Synchrotron Radiation Research Institute (Japan)
S. Goto, Japan Synchrotron Radiation Research Institute (Japan)
T. Ishikawa, RIKEN SPring-8 Ctr. (Japan)


Published in SPIE Proceedings Vol. 7801:
Advances in Metrology for X-Ray and EUV Optics III
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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