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Proceedings Paper

Surface profile measurement of KB mirrors using Fizeau laser interferometer
Author(s): J. Qian; L. Assoufid; C. Liu; B. Shi; W. Liu
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Paper Abstract

Fizeau interferometer is the most commonly used interferometer for testing optical components. The aim of this work is to apply this technique to the measurement of elliptical Kirkpatrick-Baez (KB) mirrors during their fabrication process. KB mirrors are widely used at synchrotron radiation facilities around the world for x-ray focusing. Fizeau interferometer can provide accurate measurements for KB mirrors. Recently a KB mirror that can focus X-ray down to 150 nm has been fabricated in the Argonne National Laboratory.

Paper Details

Date Published: 27 August 2010
PDF: 6 pages
Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 78010K (27 August 2010); doi: 10.1117/12.860760
Show Author Affiliations
J. Qian, Argonne National Lab. (United States)
L. Assoufid, Argonne National Lab. (United States)
C. Liu, Argonne National Lab. (United States)
B. Shi, Argonne National Lab. (United States)
W. Liu, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 7801:
Advances in Metrology for X-Ray and EUV Optics III
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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