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Proceedings Paper

Robust liquid metal collector mirror for EUV and soft x-ray plasma sources
Author(s): Kenneth Fahy; Fergal O'Reilly; Enda Scally; Paul Sheridan
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Paper Abstract

Recent work in UCD has centred on the development of a liquid metal coating process for EUV and soft X-ray collector optics. The work involves using a room temperature liquid metal coated on a solid metal substrate of the appropriate form. The advances made demonstrate that a stable thin coating film on the interior surface of a rotating optic substrate is possible, and this offers promise as a solution to the problem of producing an atomically flat reflector that remains unspoiled in front of a multi-kilowatt EUV plasma. We report on the results of preliminary EUV tests carried out on a simple focusing liquid metal mirror.

Paper Details

Date Published: 27 August 2010
PDF: 6 pages
Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 78020K (27 August 2010); doi: 10.1117/12.860747
Show Author Affiliations
Kenneth Fahy, Univ. College Dublin (Ireland)
Fergal O'Reilly, Univ. College Dublin (Ireland)
Enda Scally, Univ. College Dublin (Ireland)
Paul Sheridan, Univ. College Dublin (Ireland)

Published in SPIE Proceedings Vol. 7802:
Advances in X-Ray/EUV Optics and Components V
Shunji Goto; Ali M. Khounsary; Christian Morawe, Editor(s)

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