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Proceedings Paper

Using chromatic confocal apparatus for in situ rolling thickness measurement in hot embossing process
Author(s): Yi-Chang Chen; Shu-Ping Dong; Chun-Chieh Wang; Shih Hsuan Kuo; Wei Cheng Wang; Hung-Ming Tai
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Paper Abstract

The in-situ measurements for continuously rolling optical films by the chromatic confocal apparatus have been successfully achieved by the authors. The apparatus presented here consists of chromatic confocal to avoid the vibrations caused by the roller machine while working. Without the need of the vertical z axis scan, chromatic confocal can give instant thickness measurements. Therefore, the apparatus possesses the characters of high resolution and fast response. We believe that this system can highly monitor and improve the yield rate in production lines.

Paper Details

Date Published: 24 August 2010
PDF: 7 pages
Proc. SPIE 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 77670P (24 August 2010); doi: 10.1117/12.860565
Show Author Affiliations
Yi-Chang Chen, Industrial Technology Research Institute (Taiwan)
Shu-Ping Dong, Industrial Technology Research Institute (Taiwan)
Chun-Chieh Wang, Industrial Technology Research Institute (Taiwan)
Shih Hsuan Kuo, Industrial Technology Research Institute (Taiwan)
Wei Cheng Wang, Industrial Technology Research Institute (Taiwan)
Hung-Ming Tai, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 7767:
Instrumentation, Metrology, and Standards for Nanomanufacturing IV
Michael T. Postek, Editor(s)

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