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Proceedings Paper

Nb-doped TiO2 transparent conducting coating by pulsed DC magnetron co-sputtering
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Paper Abstract

Nb doped TiO2 (TNO) is a promising transparent conducting oxide suitable for many applications such as in solar cells, OLEDs, LEDs, FPDs, touch panels, etc. TNO thin film was deposited on an unheated glass substrate by pulsed direct current (DC) magnetron co-sputtering. After annealing in a vacuum (<9×10-6 Torr) at 370° for 10 minutes, the film crystallized into a polycrystalline anatase TiO2 structure, the resistivity decreased to 4.5×10-4 Ω-cm and the average transmittance increased to above 70% in the visible light region. The influence of annealing on the TNO amorphous-to-anatase phase transition, decrease in the resistivity and increase in the average transmittance will be discussed.

Paper Details

Date Published: 19 August 2010
PDF: 8 pages
Proc. SPIE 7786, Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI, 77860R (19 August 2010); doi: 10.1117/12.860483
Show Author Affiliations
Ssu-Hsiang Peng, National Central Univ. (Taiwan)
Chien-Cheng Kuo, National Central Univ. (Taiwan)
Meng-Chi Li, National Central Univ. (Taiwan)
Shu-Hui Tsai, National Central Univ. (Taiwan)
Cheng-Chung Lee, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 7786:
Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI
R. Barry Johnson; Virendra N. Mahajan; Simon Thibault, Editor(s)

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