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Proceedings Paper

Development of spider micro-structured optical arrays for x-ray optics
Author(s): Daniel Rodriguez Sanmartin; Dou Zhang; Tim Button; Carl Meggs; Carolyn Atkins; Peter Doel; David Brooks; Charlotte Feldman; Richard Willingale; Alan Michette; Slawka Pfauntsch; Shahin Sahraei; Matthew Shand; Ady James; Graham Willis; Camelia Dunare; Tom Stevenson; William Parkes; Andy Smith
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Paper Abstract

The Smart X-Ray Optics (SXO) project comprises a U.K.-based consortium developing active/adaptive micro-structured optical arrays (MOAs). These devices are designed to focus X-rays using grazing incidence reflection through consecutive aligned arrays of microscopic channels etched in silicon. Adaptability is achieved using a combination of piezoelectric actuators, which bend the edges of the silicon chip, and a spider structure, which forms a series of levers connecting the edges of the chip with the active area at the centre, effectively amplifying the bend radius. Test spider structures, have been bent to a radius of curvature smaller than 5 cm, indicating that in complete devices a suitable focal length using a tandem pair configuration could be achieved. Finite Element Analysis (FEA) modelling has been carried out for the optimization of the spider MOA device design. Prototype devices have been manufactured using a Viscous Plastic Processing technique for the PZT piezoelectric actuators, and a single wet etch step using {111} planes in a (110) silicon wafer for both the silicon channels and the spider structure. A surface roughness of 1.2 nm was achieved on the silicon channel walls. Characterisation techniques have been developed in order to evaluate the device performance in terms of the bending of the MOA channels produced by the actuators. This paper evaluates the progress to date on the development of spider MOA's comparing FEA modelling with the results obtained for prototype structures.

Paper Details

Date Published: 1 September 2010
PDF: 11 pages
Proc. SPIE 7803, Adaptive X-Ray Optics, 780306 (1 September 2010); doi: 10.1117/12.860420
Show Author Affiliations
Daniel Rodriguez Sanmartin, The Univ. of Birmingham (United Kingdom)
Dou Zhang, The Univ. of Birmingham (United Kingdom)
Tim Button, The Univ. of Birmingham (United Kingdom)
Carl Meggs, The Univ. of Birmingham (United Kingdom)
Carolyn Atkins, Univ. College London (United Kingdom)
Peter Doel, Univ. College London (United Kingdom)
David Brooks, Univ. College London (United Kingdom)
Charlotte Feldman, Univ. of Leicester (United Kingdom)
Richard Willingale, Univ. of Leicester (United Kingdom)
Alan Michette, King's College London (United Kingdom)
Slawka Pfauntsch, King's College London (United Kingdom)
Shahin Sahraei, King's College London (United Kingdom)
Matthew Shand, King's College London (United Kingdom)
Ady James, Mullard Space Science Lab., Univ. College London (United Kingdom)
Graham Willis, Mullard Space Science Lab., Univ. College London (United Kingdom)
Camelia Dunare, Scottish Microelectronics Ctr., The Univ. of Edinburgh (United Kingdom)
Tom Stevenson, Scottish Microelectronics Ctr., The Univ. of Edinburgh (United Kingdom)
William Parkes, Scottish Microelectronics Ctr., The Univ. of Edinburgh (United Kingdom)
Andy Smith, STFC-Daresbury Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 7803:
Adaptive X-Ray Optics
Ali M. Khounsary; Stephen L. O'Dell; Sergio R. Restaino, Editor(s)

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