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Proceedings Paper

Surface characterization of polished glass substrate and carbon film using AFM and power spectral density function
Author(s): Jingtao Zhu; Zhanshan Wang; Qiushi Huang
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Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 780109; doi: 10.1117/12.860399
Show Author Affiliations
Jingtao Zhu, Tongji Univ. (China)
Zhanshan Wang, Tongji Univ. (China)
Qiushi Huang, Tongji Univ. (China)


Published in SPIE Proceedings Vol. 7801:
Advances in Metrology for X-Ray and EUV Optics III
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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