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Proceedings Paper

New type of x-ray source for lensless laboratory nano-CT with 50-nm resolution
Author(s): Alexander Sasov; Bart Pauwels; Peter Bruyndonckx
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Paper Abstract

Most X-ray systems are limited in spatial resolution by the x-ray source performance. In laboratory sources, x-rays are generated by the interaction of an electron beam with a metal target. Bulk target sources produce a spot size in the micron range. Thin layer targets allow a spot size improvement down to hundreds of nanometers, but with a significant flux reduction. Until now a spatial resolution under 100 nm could only be achieved by imaging with Fresnel zone plates with limited depth of focus, typically - several microns. This is acceptable for imaging of flat objects, but it creates a problem for tomography, which requires all parts of a bulk object to be in focus. To overcome the limitations, we invented an x-ray source with a new type of target. Because x-ray cameras can only collect photons from a small angle, the new emitter is physically shaped in such way that the camera can see it as a small dot, but it has a big length along the direction perpendicular to the camera creating a significant flux without compromising the resolution. Evaluation shows that structures down to 50 nm can be distinguished while maintaining a significant x-ray flux and infinite depth of focus required for nano-tomographical reconstruction.

Paper Details

Date Published: 2 September 2010
PDF: 8 pages
Proc. SPIE 7804, Developments in X-Ray Tomography VII, 78040Q (2 September 2010); doi: 10.1117/12.860340
Show Author Affiliations
Alexander Sasov, SkyScan N.V. (Belgium)
Bart Pauwels, SkyScan N.V. (Belgium)
Peter Bruyndonckx, SkyScan N.V. (Belgium)

Published in SPIE Proceedings Vol. 7804:
Developments in X-Ray Tomography VII
Stuart R. Stock, Editor(s)

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