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Proceedings Paper

Large-field high-energy KB microscope with aperiodic multilayer
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Paper Abstract

Periodic multilayer KB microscopes have widely implemented in x-ray diagnostic experiments of ICF, especially at relatively high x-ray energies (8keV or higher). But the obvious disadvantage, due to narrow bandwidth of periodic multilayer, is the ununiformity of x-ray image brightness and the limited field of view. The literature describes the characterization of a high-energy KB microscope with aperiodic multilayer configured to achieve larger effective field of view than existing periodic multilayer KB microscopes. The microscope, working on 8keV with grazing angles of 1.1330° and 1.1837°, is capable of 5μm resolution over ±200μm object field. Design of the multilayer and experimental results with a Cu x-ray tube will be shown.

Paper Details

Date Published: 2 September 2010
PDF: 6 pages
Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 78010C (2 September 2010); doi: 10.1117/12.860271
Show Author Affiliations
Shengzhen Yi, Tongji Univ. (China)
Baozhong Mu, Tongji Univ. (China)
Zhanshan Wang, Tongji Univ. (China)
Xin Wang, Tongji Univ. (China)
Li Jiang, Tongji Univ. (China)
Jingtao Zhu, Tongji Univ. (China)


Published in SPIE Proceedings Vol. 7801:
Advances in Metrology for X-Ray and EUV Optics III
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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