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Proceedings Paper

An overlapping technique to measure the parallelism of surface elements in a large area based on comparison goniometer
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Paper Abstract

Comparison goniometer, precision autocollimator, can be used to measure parallelism or angular error. If the size of the work piece to be measured is larger than the aperture of the objective lens, the measurement can not be carried through, because a part of work piece can't be observed. A new technique, called overlapping measurement technique, is proposed. The work piece will be moved, and two adjacent measurements must have an intercross. The relationship between the readings of the autocollimator and the angular error has been deduced. A program written in VC++6.0 will be used to process the measurement data.

Paper Details

Date Published: 15 September 2010
PDF: 8 pages
Proc. SPIE 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 77670S (15 September 2010); doi: 10.1117/12.860077
Show Author Affiliations
Zhi-shan Wang, Beijing Institute of Technology (China)
Henan Univ. of Technology (China)
Yue-jin Zhao, Beijing Institute of Technology (China)
Zhuo Li, Beijing Institute of Technology (China)
Liquan Dong, Beijing Institute of Technology (China)
Xuhong Chu, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 7767:
Instrumentation, Metrology, and Standards for Nanomanufacturing IV
Michael T. Postek, Editor(s)

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