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Proceedings Paper

Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range
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Paper Abstract

A modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) gratings and arrays [Proc. SPIE 7077-7 (2007), Opt. Eng. 47(7), 073602-1-5 (2008)] has been proven to be an effective MTF calibration method for a number of interferometric microscopes and a scatterometer [Nucl. Instr. and Meth. A 616, 172-82 (2010]. Here we report on a significant expansion of the application range of the method. We describe the MTF calibration of a 6 inch phase shifting Fizeau interferometer. Beyond providing a direct measurement of the interferometer's MTF, tests with a BPR array surface have revealed an asymmetry in the instrument's data processing algorithm that fundamentally limits its bandwidth. Moreover, the tests have illustrated the effects of the instrument's detrending and filtering procedures on power spectral density measurements. The details of the development of a BPR test sample suitable for calibration of scanning and transmission electron microscopes are also presented. Such a test sample is realized as a multilayer structure with the layer thicknesses of two materials corresponding to BPR sequence. The investigations confirm the universal character of the method that makes it applicable to a large variety of metrology instrumentation with spatial wavelength bandwidths from a few nanometers to hundreds of millimeters.

Paper Details

Date Published: 1 September 2010
PDF: 12 pages
Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 78010B (1 September 2010); doi: 10.1117/12.860049
Show Author Affiliations
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
Samuel K. Barber, Lawrence Berkeley National Lab. (United States)
Nathalie Bouet, NSLS-II, Brookhaven National Lab. (United States)
Rossana Cambie, Lawrence Berkeley National Lab. (United States)
Raymond Conley, NSLS-II, Brookhaven National Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)
Dmitriy L. Voronov, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 7801:
Advances in Metrology for X-Ray and EUV Optics III
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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