Share Email Print
cover

Proceedings Paper

Fabrication of microstructures on nickel alloy by DPSS laser ablation technique for lab-on-chip applications
Author(s): Qiuping Chen; Qiuling Chen; Gabriele Maccioni; Sergio Ferrero; Luciano Scaltrito; Adriano Sacco
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A novel technique for the fabrication of micro-structures on Ni-alloy by DPSS laser ablation was studied and reported in this paper. Using a q-switched Nd:YVO4 laser, a Ni alloy was micro-machined without lithography-based technologies. The effects of various process parameters such as working power, laser frequency, scan speed and number of scan were examined during laser processing. The removal of debris during ablation was also studied, and performed under vacuum conditions. The obtained prototype was tested by optical microscopy, Scanning Electron Microscopy, EDX and 3D microprofilometer. The obtained structured nickel alloy can be used as master for imprinting on glass substrates for lab-on-chip applications.

Paper Details

Date Published: 27 August 2010
PDF: 11 pages
Proc. SPIE 7762, Optical Trapping and Optical Micromanipulation VII, 776239 (27 August 2010); doi: 10.1117/12.859992
Show Author Affiliations
Qiuping Chen, Politecnico di Torino (Italy)
Qiuling Chen, Politecnico di Torino (Italy)
Gabriele Maccioni, Politecnico di Torino (Italy)
Microla Optoelectronics S.r.l. (Italy)
Sergio Ferrero, Politecnico di Torino (Italy)
Microla Optoelectronics S.r.l. (Italy)
Luciano Scaltrito, Politecnico di Torino (Italy)
Microla Optoelectronics S.r.l. (Italy)
Adriano Sacco, Politecnico di Torino (Italy)
Microla Optoelectronics S.r.l. (Italy)


Published in SPIE Proceedings Vol. 7762:
Optical Trapping and Optical Micromanipulation VII
Kishan Dholakia; Gabriel C. Spalding, Editor(s)

© SPIE. Terms of Use
Back to Top