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Proceedings Paper

Ordered/disordered broadband antireflective structures for near-infrared detector applications
Author(s): Young Min Song; Eun Sil Choi; Gyeong Cheol Park; Sung Jun Jang; Jae Su Yu; Yong Tak Lee
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Paper Abstract

This study reports broadband antireflective subwavelength structures (SWS) on various semiconductor materials for near-infrared detector applications. Two fabrication methods are proposed, i.e., a lenslike shape transfer and an overall dry etch process of Ag nanoparticles. These methods provide relatively simple, fast, inexpensive process steps, which is applicable for practical device applications. The fabricated SWS showed extremely lower reflectance spectra compared to that of flat surface in the near-IR range, indicating good agreement with the simulation results. We also propose amorphous silicon SWS on InGaAs photodetector to enhance the absorption efficiency.

Paper Details

Date Published: 28 August 2010
PDF: 9 pages
Proc. SPIE 7808, Infrared Remote Sensing and Instrumentation XVIII, 78080Y (28 August 2010); doi: 10.1117/12.859985
Show Author Affiliations
Young Min Song, Gwangju Institute of Science and Technology (Korea, Republic of)
Eun Sil Choi, Gwangju Institute of Science and Technology (Korea, Republic of)
Gyeong Cheol Park, Gwangju Institute of Science and Technology (Korea, Republic of)
Sung Jun Jang, Gwangju Institute of Science and Technology (Korea, Republic of)
Jae Su Yu, Kyung Hee Univ. (Korea, Republic of)
Yong Tak Lee, Gwangju Institute of Science and Technology (Korea, Republic of)


Published in SPIE Proceedings Vol. 7808:
Infrared Remote Sensing and Instrumentation XVIII
Marija Strojnik; Gonzalo Paez, Editor(s)

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