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Proceedings Paper

Excimer laser micro-machining optimization using beam-homogenizers-based optical system
Author(s): Vasile Sava; Cristinel Ilie; Marius Popa; Mihaela Stoica; Mircea Udrea
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Paper Abstract

This paper describes the experimental results in micro-machining technology which were performed by using a 248 nm KrF excimer laser, beam homogenizers, mask image, projection lens and a five axis computer numerical controlled (CNC) equipment. The optical system is composed by two beam homogenizers of different focal lengths, a condenser lens that takes and reshapes the laser beam, the field lens that collimates the beam, the mask that defines the image and the projection lens. The shape of the mask is kept identical on the target in the micrometric scale. The components which were manufactured are intended to be used to develop micro-motors and gyroscopes.

Paper Details

Date Published: 17 May 2010
PDF: 7 pages
Proc. SPIE 7469, ROMOPTO 2009: Ninth Conference on Optics: Micro- to Nanophotonics II, 74690U (17 May 2010); doi: 10.1117/12.859696
Show Author Affiliations
Vasile Sava, Univ. of Bucharest (Romania)
Cristinel Ilie, National Institute of Research and Development for Electrical Engineering (Romania)
Marius Popa, National Institute of Research and Development for Electrical Engineering (Romania)
Mihaela Stoica, National Institute for Laser, Plasma and Radiation Physics (Romania)
Mircea Udrea, National Institute for Laser, Plasma and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 7469:
ROMOPTO 2009: Ninth Conference on Optics: Micro- to Nanophotonics II
Valentin I. Vlad, Editor(s)

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