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Proceedings Paper

Front- and backside structuring of gratings for phase contrast imaging with x-ray tubes
Author(s): J. Kenntner; T. Grund; B. Matthis; M. Boerner; J. Mohr; T. Scherer; M. Walter; M. Willner; A. Tapfer; M. Bech; F. Pfeiffer; I. Zanette; T. Weitkamp
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Paper Abstract

Phase contrast imaging with conventional X-ray tubes as e.g. in computer tomography scanners (CTscanners) requires a setup of three different types of optical gratings. One grating is used to obtain a spatially coherent radiation, the second grating defines a periodic phase shift and the third is used as a periodic absorption grating. In order to absorb high energy radiation, absorption gratings with periods of a few microns only and extreme aspect ratios (>80) are fabricated, employing a modified LIGA process. However, above a critical structural height, structures collapse due to e.g. capillary effects. To overcome this limitation a new variant of the LIGA process has been developed. It is characterized by structuring of a resist on both sides of a membrane, resulting in a moderate aspect ratio on both sides of the membrane instead of an extreme aspect ratio on one side. To get a perfect overlay of both structures the grating structure on the front side of a membrane patterned by the standard LIGA-process is used as the mask for structuring the second resist layer on the backside of the membrane. A second electroforming step fills the gaps on the backside.

Paper Details

Date Published: 2 September 2010
PDF: 10 pages
Proc. SPIE 7804, Developments in X-Ray Tomography VII, 780408 (2 September 2010); doi: 10.1117/12.859666
Show Author Affiliations
J. Kenntner, Karlsruher Institut für Technologie (Germany)
T. Grund, Karlsruher Institut für Technologie (Germany)
B. Matthis, Karlsruher Institut für Technologie (Germany)
M. Boerner, Karlsruher Institut für Technologie (Germany)
J. Mohr, Karlsruher Institut für Technologie (Germany)
T. Scherer, Karlsruher Institut für Technologie (Germany)
M. Walter, Microworks GmbH (Germany)
M. Willner, Technische Univ. München (Germany)
A. Tapfer, Technische Univ. München (Germany)
M. Bech, Technische Univ. München (Germany)
F. Pfeiffer, Technische Univ. München (Germany)
I. Zanette, European Synchrotron Radiation Facility (France)
T. Weitkamp, European Synchrotron Radiation Facility (France)

Published in SPIE Proceedings Vol. 7804:
Developments in X-Ray Tomography VII
Stuart R. Stock, Editor(s)

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