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Proceedings Paper

Rutherford backscattering and optical studies for ZnO thin films on sapphire substrates grown by metalorganic chemical vapor deposition
Author(s): Yee Ling Chung; Lin Li; Shude Yao; Zhe Chuan Feng; William E. Fenwick; Tahir Zaidi; Ian T. Ferguson; Weijie Lu
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Paper Abstract

A series of ZnO thin films with different thicknesses grown on sapphire substrates by metalorganic chemical vapor deposition (MOCVD) have been studied by different characterization techniques. The optical properties are investigated by photoluminescence (PL), optical transmission (OT) and 1st order derivatives, various angle scanning ellipsometry (VASE). Rutherford Backscattering (RBS) shows the atomic Zn:O ratios with a few percentage aviation from 1:1, and thicknesses in range of 10~230 nm, roughness layer with 10~30nm, which are corresponding to results from atomic force microscopy (AFM), and scanning electron microscopy (SEM). The optical and structure characterization measurements have confirmed the good quality of these epitaxial ZnO materials.

Paper Details

Date Published: 23 August 2010
PDF: 10 pages
Proc. SPIE 7784, Tenth International Conference on Solid State Lighting, 778416 (23 August 2010); doi: 10.1117/12.859109
Show Author Affiliations
Yee Ling Chung, National Taiwan Univ. (Taiwan)
Lin Li, Peking Univ. (China)
Shude Yao, Peking Univ. (China)
Zhe Chuan Feng, National Taiwan Univ. (Taiwan)
William E. Fenwick, Georgia Institute of Technology (United States)
Tahir Zaidi, Georgia Institute of Technology (United States)
Ian T. Ferguson, The Univ. of North Carolina at Charlotte (United States)
Weijie Lu, Fisk Univ. (United States)


Published in SPIE Proceedings Vol. 7784:
Tenth International Conference on Solid State Lighting
Ian Ferguson; Matthew H. Kane; Nadarajah Narendran; Tsunemasa Taguchi, Editor(s)

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