Share Email Print
cover

Proceedings Paper

Three-dimensional microstructure measurement by high-resolution fringe analysis for shadow moiré image by SEM
Author(s): Y. Arai; S. Kanameishi; S. Yokozeki
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A new fringe analysis for shadow moiré new fringe analysis for shadow moiré using a SEM is proposed in order to perform a high resolution 3-D shape measurement. Two sheets of shadow moiré fringe images are grabbed by shifting the grating using PZT. One sheet of deformed shadow of grating image which does not include any original grid image is reconstructed from two shadow moiré fringe images by using the new method. In experiments, a sphere that is a bearing ball(diameter:700μm) was measured by the method. The standard deviation of the difference between the measured result and the ideal shape as the sphere was 95nm. From the results, it was confirmed that the proposed method had not only a high measuring accuracy but also a spatial high-resolution power(330nm). using a SEM is proposed in order to perform a high resolution 3-D shape measurement. Two sheets of shadow moiré fringe images are grabbed by shifting the grating using PZT. One sheet of deformed shadow of grating image which does not include any original grid image is reconstructed from two shadow moiré fringe images by using the new method. In experiments, a sphere that is a bearing ball(diameter:700μm) was measured by the method. The standard deviation of the difference between the measured result and the ideal shape as the sphere was 95nm. From the results, it was confirmed that the proposed method had not only a high measuring accuracy but also a spatial high-resolution power(330nm).

Paper Details

Date Published: 3 August 2010
PDF: 8 pages
Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900E (3 August 2010); doi: 10.1117/12.859101
Show Author Affiliations
Y. Arai, Kansai Univ. (Japan)
S. Kanameishi, Kansai Univ. (Japan)
S. Yokozeki, Jyouko Applied Optics Lab. (Japan)


Published in SPIE Proceedings Vol. 7790:
Interferometry XV: Techniques and Analysis
Catherine E. Towers; Joanna Schmit; Katherine Creath, Editor(s)

© SPIE. Terms of Use
Back to Top