Share Email Print

Proceedings Paper

Improved EUV filter transmission with plasma cleaning
Author(s): Bruce M. Lairson; Dave Grove; Ryan Smith; Heidi Lopez; Travis Ayers; Brennan L. Gantner; Matthew N. Beasley
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

As-fabricated free-standing indium foils were found to have transmission in the 90nm to 120nm band ranging from 10% to 70% of modeled values based on pure indium. Auger depth profiling of the as-deposited indium showed little surface contamination and high purity. However, final freestanding filters were found to have heavy contamination, particularly on the surface. An argon/hydrogen plasma bombardment was developed which improved EUV transmission by 50% to 500% in the finished filters without causing significant pinholes to develop in the foils or appreciably affecting blocking characteristics.

Paper Details

Date Published: 29 July 2010
PDF: 6 pages
Proc. SPIE 7732, Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray, 77322G (29 July 2010); doi: 10.1117/12.857739
Show Author Affiliations
Bruce M. Lairson, Luxel Corp. (United States)
Dave Grove, Luxel Corp. (United States)
Ryan Smith, Luxel Corp. (United States)
Heidi Lopez, Luxel Corp. (United States)
Travis Ayers, Luxel Corp. (United States)
Brennan L. Gantner, Univ. of Colorado at Boulder (United States)
Matthew N. Beasley, Univ. of Colorado at Boulder (United States)

Published in SPIE Proceedings Vol. 7732:
Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray
Monique Arnaud; Stephen S. Murray; Tadayuki Takahashi, Editor(s)

© SPIE. Terms of Use
Back to Top