Share Email Print
cover

Proceedings Paper

Hybridization of a sigma-delta-based CMOS hybrid detector
Author(s): K. E. Kolb; N. C. Stoffel; B. Douglas; C. W. Maloney; A. D. Raisanen; B. Ashe; D. F. Figer; T. Tamagawa; B. Halpern; Zeljko Ignjatovic
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The Rochester Imaging Detector Laboratory, University of Rochester, Infotonics Technology Center, and Jet Process Corporation developed a hybrid silicon detector with an on-chip sigma-delta (ΣΔ) ADC. This paper describes the process and reports the results of developing a fabrication process to robustly produce high-quality bump bonds to hybridize a back-illuminated detector with its ΣΔ ADC. The design utilizes aluminum pads on both the readout circuit and the photodiode array with interconnecting indium bumps between them. The development of the bump bonding process is discussed, including specific material choices, interim process structures, and final functionality. Results include measurements of bond integrity, cross-wafer uniformity of indium bumps, and effects of process parameters on the final product. Future plans for improving the bump bonding process are summarized.

Paper Details

Date Published: 13 July 2010
PDF: 9 pages
Proc. SPIE 7742, High Energy, Optical, and Infrared Detectors for Astronomy IV, 77420C (13 July 2010); doi: 10.1117/12.857510
Show Author Affiliations
K. E. Kolb, Rochester Institute of Technology (United States)
N. C. Stoffel, Infotonics Technology Ctr. (United States)
B. Douglas, Infotonics Technology Ctr. (United States)
C. W. Maloney, Rochester Institute of Technology (United States)
A. D. Raisanen, Rochester Institute of Technology (United States)
B. Ashe, Rochester Institute of Technology (United States)
D. F. Figer, Rochester Institute of Technology (United States)
T. Tamagawa, Jet Process Corp. (United States)
B. Halpern, Jet Process Corp. (United States)
Zeljko Ignjatovic, Univ. of Rochester (United States)


Published in SPIE Proceedings Vol. 7742:
High Energy, Optical, and Infrared Detectors for Astronomy IV
Andrew D. Holland; David A. Dorn, Editor(s)

© SPIE. Terms of Use
Back to Top