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Proceedings Paper

Inductive sensors for controlling segmented mirrors: a full industrial and turnkey product solution
Author(s): Bruno Luong; Christian Néel; Ambroise Périn; Didier Rozière
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Paper Abstract

This paper presents a recent progress in designing a nanometer-accurate inductive-type of edge sensor. A new technology of Direct Deposit on Glass (DDG) has been developed. The DDG technology also has high rate of reproducibility and is suitable for the mass production and still be a very cost-effective solution. The sensor designs are fully optimized using mechanical and EM modeling for specific metrology needs. We discuss briefly on various electronic architectures and their impacts on the maintainability of the system. We conclude the paper by showing the experimental results.

Paper Details

Date Published: 12 August 2010
PDF: 13 pages
Proc. SPIE 7733, Ground-based and Airborne Telescopes III, 77332D (12 August 2010); doi: 10.1117/12.856406
Show Author Affiliations
Bruno Luong, FOGALE nanotech (France)
Christian Néel, FOGALE nanotech (France)
Ambroise Périn, FOGALE nanotech (France)
Didier Rozière, FOGALE nanotech (France)


Published in SPIE Proceedings Vol. 7733:
Ground-based and Airborne Telescopes III
Larry M. Stepp; Roberto Gilmozzi; Helen J. Hall, Editor(s)

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