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Proceedings Paper

Using a helium ion microscope in a clean-room environment
Author(s): Harvey N. Rutt; Thomas M. W. Franklin
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Paper Details

Date Published:
Proc. SPIE 7729, Scanning Microscopy 2010, 77290I; doi: 10.1117/12.856235
Show Author Affiliations
Harvey N. Rutt, Univ. of Southampton (United Kingdom)
Thomas M. W. Franklin, Univ. of Southampton (United Kingdom)

Published in SPIE Proceedings Vol. 7729:
Scanning Microscopy 2010
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy, Editor(s)

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