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Investigation of periodical microstructures using coherent radiation
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Paper Abstract

Low-cost effective characterization methodology was developed that allows indirect evaluation of mechanical, geometrical and optical parameters of periodical microstructures in the cases when traditional measurement techniques are not suitable. Proposed methods are applicable for optimization and control of technological processes. Laser diffractometer is used in the experimental works for measurement of optical parameters of periodical microstructure and estimation of geometrical parameters with an error of less than 5% by comparing theoretical and experimental values of diffraction efficiencies of periodical microstructures. This method is suitable for geometry control of periodical microstructures during all technological process. Also an efficient method was developed that is capable to estimate with an error of 5% the depth of periodical microstructures, which have characteristic depths that are larger than the wavelength of coherent light used in the experiment. Quality of periodical microstructures is sensitive to thermal conditions during replication process. Therefore an experimental setup based on Michelson interferometer was developed for the investigation of induced thermal deformation. The radius and stress kinetics could be analyzed for different thickness of coated polymer. These are the problems that are considered in this paper.

Paper Details

Date Published: 1 April 2010
PDF: 10 pages
Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76383Q (1 April 2010); doi: 10.1117/12.855943
Show Author Affiliations
Giedrius Janusas, Kaunas Univ. of Technology (Lithuania)
Arvydas Palevicius, Kaunas Univ. of Technology (Lithuania)
Regita Bendikiene, Kaunas Univ. of Technology (Lithuania)
Paulius Palevicius, Kaunas Univ. of Technology (Lithuania)

Published in SPIE Proceedings Vol. 7638:
Metrology, Inspection, and Process Control for Microlithography XXIV
Christopher J. Raymond, Editor(s)

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