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Proceedings Paper

Fabrication of freestanding SWCNT networks for fast microbolometric focal plane array sensor
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Paper Abstract

We have investigated the feasibility of significantly improving the performance of currently favored uncooled infrared (IR) detectors based on Si or VOx microbolometers with a new design employing freestanding suspended network of single-walled carbon nanotubes (SWCNTs). Such networks have high absorption coefficient, high temperature coefficient of the resistance (TCR) and extremely low thermal mass. This combination of parameters translates into an uncooled IR detector with high sensitivity and a very fast temporal response. We show estimates of key parameters for such a device, demonstrate a method to prepare it using suspended SWCNT networks achieved by selective removal of a sacrificial oxide layer, thereby forming a cavity under the SWCNT network. We also present TCR and photothermal bolometric response data of this conceptual structure.

Paper Details

Date Published: 5 May 2010
PDF: 7 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76792N (5 May 2010); doi: 10.1117/12.855589
Show Author Affiliations
Jiri Cech, Lehigh Univ. (United States)
V. Swaminathan, U.S. Army, RDECOM-ARDEC (United States)
P. Wijewarnasuriya, Army Research Lab. (United States)
Luke J. Currano, Army Research Lab. (United States)
Andriy Kovalskiy, Lehigh Univ. (United States)
H. Jain, Lehigh Univ. (United States)


Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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