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Proceedings Paper

Nanostructured metallic surfaces for enhanced transmission and polarization filtering in CMOS fabricated photodetectors
Author(s): L. A. Dunbar; M. Guillaumée; F. de León-Pérez; P.-F. Rüedi; V. Spassov; R. Eckert; F. Lopez-Tejeira; F. J. García-Vidal; E. Franzi; L. Martín-Moreno; R. P. Stanley
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Paper Abstract

The miniaturization of photodetectors often comes at the expense of a smaller photosensitive area. This can reduce the signal and thus limit the image quality. One way to overcome this limitation is to reduce the photosensitive area but with no reduction of signal i.e. harvest the light. Here we investigate, theoretically and experimentally, light harvesting with nanostructured metals. Nanostructured metals can also give additional functionality such as polarization filtering which is also investigated. After defining the figure of merits used when characterizing light harvesting and polarization filtering structures, we detail the fabrication and measurement process. Structures were made on glass substrate, as a post process step on CMOS fabricated detectors and directly in the CMOS fabrication of the detectors. The optical characterization results are presented and compared with theory. Finally, we discuss the challenges and advantages of integrating metallic nanostructures within the CMOS process.

Paper Details

Date Published: 11 May 2010
PDF: 10 pages
Proc. SPIE 7712, Nanophotonics III, 771239 (11 May 2010); doi: 10.1117/12.855286
Show Author Affiliations
L. A. Dunbar, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
M. Guillaumée, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
F. de León-Pérez, Univ. de Zaragoza (Spain)
P.-F. Rüedi, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
V. Spassov, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
R. Eckert, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
F. Lopez-Tejeira, Univ. de Zaragoza (Spain)
F. J. García-Vidal, Univ. Autónoma de Madrid (Spain)
E. Franzi, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
L. Martín-Moreno, Univ. de Zaragoza (Spain)
R. P. Stanley, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)


Published in SPIE Proceedings Vol. 7712:
Nanophotonics III
David L. Andrews; Jean-Michel Nunzi; Andreas Ostendorf, Editor(s)

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