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Proceedings Paper

Near-field spectroscopy of nanostructures
Author(s): Zexiang Shen; Yun Ma; Hailong Hu; Johnson Kasim
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Paper Abstract

We report a new near-field Raman imaging technique by trapping and scanning a dielectric microsphere over a sample surface in water. This method has a few critical advantages over both aperture and apertureless near-field Raman techniques, such as strong near-field signal, high reproducibility, high resolution and cheap cost. In this method, the laser is focused to a spot smaller than diffraction limit and only the near-field signal is collected. Using this method, we have achieved spatial resolution of 80 nm. This spatial resolution is extremely useful and powerful for a wide range of applications such as the characterization of nanostructures and nano devices. We show the capability of our technique using a series of nanometer sized samples, e.g. device sample with 45 nm poly-Si gates with SiGe stressors, Au nanopatterns and Au nanobowl structures. Besides of the achievement of high resolution, our near-field technique also provides the opportunity to explore the near-field optical response of surface plasmons of metal nanostructures that cannot be attained by far-field spectroscopy.

Paper Details

Date Published: 29 April 2010
PDF: 9 pages
Proc. SPIE 7711, Metamaterials V, 77111V (29 April 2010); doi: 10.1117/12.855104
Show Author Affiliations
Zexiang Shen, Nanyang Technological Univ. (Singapore)
Yun Ma, Nanyang Technological Univ. (Singapore)
Hailong Hu, Nanyang Technological Univ. (Singapore)
Johnson Kasim, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 7711:
Metamaterials V
Nigel P. Johnson; Ekmel Özbay; Richard W. Ziolkowski; Nikolay I. Zheludev, Editor(s)

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