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Proceedings Paper

Next-generation test equipment for micro-production
Author(s): Kay Gastinger; Lars Johnsen; Malgorzata Kujawinska; Michal Jozwik; Uwe Zeitner; Peter Dannberg; Jorge Albero; Sylwester Bargiel; Christoph Schaeffel; Stephan Beer; Rudolf Moosburger; Patrick Lambelet; Marco Pizzi
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Paper Abstract

The paper introduces different approaches to overcome the large ratio between wafer size and feature size in the testing step of micro production. For the inspection of Micro(Opto)ElectroMechanicalSystems (M(O)EMS) a priori information are available to optimise the inspection process. The EU-project SMARTIEHS develops a new concept for high volume M(O)EMS testing. The design of the test station and the fabrication of the first components are presented and the advancements compared to the state of the art are introduced within the following fields: micro-optical interferometer design, micro-optical production, smart-pixel camera and mechanical design. Furthermore the first demonstrators are introduced and experimental results are presented.

Paper Details

Date Published: 14 May 2010
PDF: 16 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180F (14 May 2010); doi: 10.1117/12.855087
Show Author Affiliations
Kay Gastinger, SINTEF IKT (Norway)
Lars Johnsen, SINTEF IKT (Norway)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)
Michal Jozwik, Warsaw Univ. of Technology (Poland)
Uwe Zeitner, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Peter Dannberg, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Jorge Albero, CNRS FEMTO-ST (France)
Sylwester Bargiel, CNRS FEMTO-ST (France)
Christoph Schaeffel, Institut für Mikroelektronik- und Mechatronik- Systeme gemeinnützige GmbH (Germany)
Stephan Beer, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Rudolf Moosburger, Heliotis Inc. (Switzerland)
Patrick Lambelet, Heliotis Inc. (Switzerland)
Marco Pizzi, Techfab s.r.l. (Italy)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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