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Proceedings Paper

Deep-ultraviolet digital holographic microscopy for nano-inspection
Author(s): Ahmad Faridian; David Hopp; Giancarlo Pedrini; Wolfgang Osten
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Paper Abstract

We present an off-axis digital holographic setup in the deep ultraviolet to improve the resolution of the optical microscopy down to the nanoscale. A deep (193 nm) UV laser has been used as a source and the setup arranged in a way to avoid aberrations due to the non-perfect optical elements. A cost-effective high aperture objective ( NA = 0.75 ) has been designed which is aberration-corrected for a long working distance. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. The system has the capability to investigate samples in both reflection and transmission mode.

Paper Details

Date Published: 12 May 2010
PDF: 9 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 771803 (12 May 2010); doi: 10.1117/12.854885
Show Author Affiliations
Ahmad Faridian, Univ. Stuttgart (Germany)
David Hopp, Univ. Stuttgart (Germany)
Giancarlo Pedrini, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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