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Proceedings Paper

Interferometric precision with Fourier-based deflectometry
Author(s): D. Beghuin; X. Dubois; L. Joannes; X. Hutsebaut; P. Antoine
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Paper Abstract

Optical components are routinely tested with inteferometric based techniques. It is show in this paper that Fourier based deflectometry method can be used for optical component inspection through very sensitive and precise wavefront reconstruction. The wavefront is expressed from the raw measurements of the wavefront derivatives as a Zernike polynomial expansion. The form of the polynomials permits absolute instrumental error characterization by repeated measurement of the element under test oriented at several azimuthal angles. It is shown that nanometric precision of Zernike based reconstructions can be performed and that the air turbulences are the experimental limiting factor to the instrumental precision.

Paper Details

Date Published: 14 May 2010
PDF: 8 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180B (14 May 2010); doi: 10.1117/12.854879
Show Author Affiliations
D. Beghuin, LAMBDA-X sa (Belgium)
X. Dubois, LAMBDA-X sa (Belgium)
L. Joannes, LAMBDA-X sa (Belgium)
X. Hutsebaut, LAMBDA-X sa (Belgium)
P. Antoine, Univ. Catholique de Louvain (Belgium)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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