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Proceedings Paper

Novel approach for manufacturing of continuously shaped diffractive optical elements
Author(s): Vladimir S. Pavelyev; Yuri V. Miklyaev; Waleri Imgrunt; Maxim V. Bolshakov; Denis G. Kachalov; Victor A. Soifer; Lutz Aschke; Vitaly Lissotschenko
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Paper Abstract

Optical lithography with its 193nm technology is pushed to reach and shift its limits even further. There is strong demand on innovations in illumination part of exposure tools. Current illumination systems consisting of diffractive and refractive optical elements offer numerous benefits such as optimized laser beam shape with high homogeneity and high numerical aperture enabling high efficiency. LIMO's unique production technology is capable to manufacture free form surfaces on monolithic arrays larger than 250mm with high precision and reproducibility. Different kinds of intensity distributions with best uniformities or customized profiles have been achieved by using LIMO's refractive optical elements. Recently LIMO pushed the limits of this lens production technology and was able to manufacture first diffractive optical elements (DOE) based on continuous relief's profile. Beside for the illumination devices in lithography, DOEs find wide use in optical devices for other technological applications, such as optical communications and data processing. Up to now DOE designs follow the principle of phase diffraction gratings. Its diffraction structure with a periodic phase profile performs a superposition of beams with predefined energy ratios. Due to the application for high precise laser-beam shaping and beam splitting in optical technologies and optical fiber networks, number of grating orders is increased up to some tens or even hundreds. Classic lithographic technologies lead to quantized (step-like) profiles of diffractive micro-reliefs, which causes a decrease of beam splitter's diffractive efficiency. The newest development of LIMO's microlens fabrication technology allows us to make a step from free programmable microlens profiles to diffractive optical elements with high efficiency. Our first results of this approach are demonstrated in this paper. Diffractive beam splitters are presented. A special mathematical method is used to design diffractive optical elements with continuous surface profiles. Comparison between theoretical simulations and experimental results shows very good correlation.

Paper Details

Date Published: 13 May 2010
PDF: 7 pages
Proc. SPIE 7716, Micro-Optics 2010, 77161N (13 May 2010); doi: 10.1117/12.854836
Show Author Affiliations
Vladimir S. Pavelyev, Image Processing Systems Institute (Russian Federation)
Yuri V. Miklyaev, LIMO Lissotschenko Mikrooptik GmbH (Germany)
South Ural State Univ. (Russian Federation)
Waleri Imgrunt, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Maxim V. Bolshakov, South Ural State Univ. (Russian Federation)
Denis G. Kachalov, Samara State Aerospace Univ. (Russian Federation)
Victor A. Soifer, Samara State Aerospace Univ. (Russian Federation)
Lutz Aschke, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Vitaly Lissotschenko, LIMO Lissotschenko Mikrooptik GmbH (Germany)

Published in SPIE Proceedings Vol. 7716:
Micro-Optics 2010
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Hans Zappe, Editor(s)

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