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Proceedings Paper

SEM probe defocusing method of measurement of linear sizes of nanorelief elements
Author(s): M. N Filippov; Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Paper Abstract

The new method of measurement of linear sizes of nanorelief elements is presented. The applicability of this method to linear measurements of nanorelief elements with trapezoid profile and wide and small inclination angles of side walls is demonstrated. The results of developed method and direct measurements are compared. Examples of measurements of linear sizes of relief pitch structures are given.

Paper Details

Date Published: 26 February 2010
PDF: 9 pages
Proc. SPIE 7521, International Conference on Micro- and Nano-Electronics 2009, 752116 (26 February 2010); doi: 10.1117/12.854696
Show Author Affiliations
M. N Filippov, N.S. Kurnakov Institute of General and Inorganic Chemistry (Russian Federation)
Yu. A. Novikov, A.M. Prokhorov General Physics Institute (Russian Federation)
A. V. Rakov, Ctr. for Surface and Vacuum Research (Russian Federation)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russian Federation)


Published in SPIE Proceedings Vol. 7521:
International Conference on Micro- and Nano-Electronics 2009
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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