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Proceedings Paper

Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region
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Paper Abstract

We present a Mach-Zehnder interferometer to characterize semiconductor microlenses in transmission. We therefore make use of a wavelength of 1550nm with the possibility of expansion towards the IR spectrum. In this paper, the concept of our interferometer as well as the set-up is explained. We demonstrate the working principle and measurements on fused silica and silicon microlenses and benchmark the experimental results with measurement data obtained with well established micro-optics instrumentation tools.

Paper Details

Date Published: 14 May 2010
PDF: 6 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180N (14 May 2010); doi: 10.1117/12.854690
Show Author Affiliations
H. Ottevaere, Vrije Univ. Brussel (Belgium)
N. Vermeulen, Vrije Univ. Brussel (Belgium)
V. Gomez, Vrije Univ. Brussel (Belgium)
H. Thienpont, Vrije Univ. Brussel (Belgium)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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