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Proceedings Paper

A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry
Author(s): Chi Liu; Arvin Emadi; Huaiwen Wu; Ger de Graaf; Reinoud F. Wolffenbuttel
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Paper Abstract

A linear array of 128 Active Pixel Sensors has been developed in standard CMOS technology and a Linear Variable Optical Filter (LVOF) is added using CMOS-compatible post-process, resulting in a single chip highly-integrated highresolution microspectrometer. The optical requirements imposed by the LVOF result in photodetectors with small pitch and large length in the direction normal to the dispersed spectrum (7.2μ;m×300μm). The specific characteristics of the readout are the small pitch, low optical signals (typically a photocurrent of 100fA~1pA) and a much longer integration time as compared to regular video (typically 100μs~63s). These characteristics enable a very different trade-off between SNR and integration time and IC-compatibility. The system discussed in this paper operates in the visible part of the spectrum. The prototype is fabricated in the AMIS 0.35μm A/D CMOS technology.

Paper Details

Date Published: 14 May 2010
PDF: 10 pages
Proc. SPIE 7726, Optical Sensing and Detection, 772616 (14 May 2010); doi: 10.1117/12.854584
Show Author Affiliations
Chi Liu, Delft Univ. of Technology (Netherlands)
Arvin Emadi, Delft Univ. of Technology (Netherlands)
Huaiwen Wu, Delft Univ. of Technology (Netherlands)
Ger de Graaf, Delft Univ. of Technology (Netherlands)
Reinoud F. Wolffenbuttel, Delft Univ. of Technology (Netherlands)


Published in SPIE Proceedings Vol. 7726:
Optical Sensing and Detection
Francis Berghmans; Anna Grazia Mignani; Chris A. van Hoof, Editor(s)

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