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Proceedings Paper

Evolution of black silicon nano- and micro-scale surface topologies upon femtosecond laser irradiation
Author(s): S. I. Kudryashov; E. V. Golosov; A. A. Ionin; Yu. R. Kolobov; A. E. Ligachev; S. V. Makarov; Yu. N. Novoselov; L. V. Seleznev; D. V. Sinitsyn
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Paper Abstract

Gradual evolution of silicon surface topology from one-dimensional to two-dimensional nanogratings and then to isotropic sets of nanospikes was observed by increasing IR and UV femtosecond laser irradiation dose (the variable number of incident laser pulses at the constant laser fluence). The fundamental mechanisms of these topological transformations are discussed.

Paper Details

Date Published: 18 May 2010
PDF: 5 pages
Proc. SPIE 7719, Silicon Photonics and Photonic Integrated Circuits II, 771921 (18 May 2010); doi: 10.1117/12.854511
Show Author Affiliations
S. I. Kudryashov, P.N. Lebedev Physical Institute (Russian Federation)
E. V. Golosov, Belgorod State Univ. (Russian Federation)
A. A. Ionin, P.N. Lebedev Physical Institute (Russian Federation)
Yu. R. Kolobov, Belgorod State Univ. (Russian Federation)
A. E. Ligachev, A. M. Prokhorov General Physics Institute (Russian Federation)
S. V. Makarov, P.N. Lebedev Physical Institute (Russian Federation)
Yu. N. Novoselov, P.N. Lebedev Physical Institute (Russian Federation)
L. V. Seleznev, P.N. Lebedev Physical Institute (Russian Federation)
D. V. Sinitsyn, P.N. Lebedev Physical Institute (Russian Federation)


Published in SPIE Proceedings Vol. 7719:
Silicon Photonics and Photonic Integrated Circuits II
Giancarlo Cesare Righini, Editor(s)

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