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Proceedings Paper

Enabling aberration retrieval of microlenses with the Extended Nijboer-Zernike (ENZ) diffraction theory
Author(s): Sven van Haver; Joseph J. M. Braat; Silvania F. Pereira
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Paper Abstract

We propose a measurement approach that allows the determination of aberrations of a microlens by analyzing the through-focus intensity image it produces when the object is a point source. To simulate image formation by a microlens we apply the extended version of the Nijboer-Zernike diffraction theory (ENZ) that uses the Debye diffraction integral to compute the image point-spread function. Due to the aperture size of the microlens and the finite dimensions of the pixels of the electronic detector the Debye diffraction integral should be adapted according to the Li-Wolf scaling rules to yield correct results. In addition to this we also discuss the experimental requirements posed by this characterization approach and derive from this a suitable experimental setup.

Paper Details

Date Published: 14 May 2010
PDF: 7 pages
Proc. SPIE 7717, Optical Modelling and Design, 77170U (14 May 2010); doi: 10.1117/12.854412
Show Author Affiliations
Sven van Haver, Delft Univ. of Technology (Netherlands)
Joseph J. M. Braat, Delft Univ. of Technology (Netherlands)
Silvania F. Pereira, Delft Univ. of Technology (Netherlands)


Published in SPIE Proceedings Vol. 7717:
Optical Modelling and Design
Frank Wyrowski; John T. Sheridan; Jani Tervo; Youri Meuret, Editor(s)

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