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Proceedings Paper

A micro-SPM head array for large-scale topography measurement
Author(s): S. Gao; Z. Li; K. Herrmann
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Paper Abstract

Rapid advances in nano-positioning/motion technology have offered metrologists in the field of precision engineering larger and larger potential measurement range. A concept of micro-SPM head array is proposed in this paper to enhance the performance of the currently available nano-measuring machines and effectively reduce the measurement time for large specimen. The proposed micro-SPM head array consists of 1 × N ( N = 7 in our case) micro-SPM heads/units, which are realized in one chip by MEMS technique. The kern of each SPM head is an electrostatic comb-drive actuator, whose main shaft protrudes out of the MEMS chip to sense the surface topography of a specimen under test. To further improve the lateral resolution of the micro-SPM head, an AFM tip can then be mounted onto the end of the actuator's main shaft. To ensure the traceability of the measurement results from micro-SPM head, a fiber-based interferometer array is considered to be integrated within the micro-SPM head array so as to in-situ calibrate the in-plane displacement sensing system of the micro-SPM head. Design and simulation of the mico-SPM head array together with the corresponding micro-interferometer will be detailed in this manuscript.

Paper Details

Date Published: 14 May 2010
PDF: 9 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77181L (14 May 2010); doi: 10.1117/12.854397
Show Author Affiliations
S. Gao, Physikalisch-Technische Bundesanstalt (Germany)
Z. Li, Physikalisch-Technische Bundesanstalt (Germany)
K. Herrmann, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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