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Proceedings Paper

Multispectral characterization of diffractive micromirror arrays
Author(s): Dirk Berndt; Jörg Heber; Steffen Sinning; Detlef Kunze; Jens Knobbe; Jan-Uwe Schmidt; Martin Bring; Dirk Rudloff; Martin Friedrichs; Jana Rössler; Mark Eckert; Wolfram Kluge; Hannes Neumann; Michael Wagner; Hubert Lakner
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Paper Abstract

The present article discusses an optical concept for the characterization of diffractive micromirror arrays (MMAs) within an extended wavelength range from the deep ultra-violet up to near-infrared. The task derives from the development of a novel class of MMAs that will support programmable diffractive properties between 240 nm and 800 nm. The article illustrates aspects of the achromatic system design that comprises the reflective beam homogenization with divergence control and coherence management for an appropriate MMA illumination as well as the transfer of phase modulating MMA patterns into intensity profiles for contrast imaging. Contrast measurements and grey scale imaging demonstrate the operation of the characterization system and reflect the encouraging start of technology development for multispectral, diffractive MMAs.

Paper Details

Date Published: 14 May 2010
PDF: 11 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180Q (14 May 2010); doi: 10.1117/12.854382
Show Author Affiliations
Dirk Berndt, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Jörg Heber, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Steffen Sinning, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Detlef Kunze, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Jens Knobbe, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Jan-Uwe Schmidt, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Martin Bring, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Dirk Rudloff, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Martin Friedrichs, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Jana Rössler, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Mark Eckert, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Wolfram Kluge, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Hannes Neumann, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Michael Wagner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Hubert Lakner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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