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Proceedings Paper

Advances in the development of the LNE metrological atomic force microscope
Author(s): Benoit Poyet; Sébastien Ducourtieux
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Paper Abstract

SPM users need to calibrate their instrument periodically in order to provide some traceable measurements and to improve their measurements capabilities. This calibration task is achieved thanks to standards - 1D or 2D gratings - whose dimensional characteristics have been characterized by a National Metrology Institute. Within this context, LNE is developing a home made metrological Atomic Force Microscope (mAFM) with direct traceable measurement capabilities. This mAFM will be able to calibrate those standards. The measurement volume is about 60 μm for X and Y axis and about 10 μm for Z axis. The expected uncertainty for the tip-sample relative position measurement is in the order of 1 nm. This paper focus on the specific development that have been achieved: a three axis flexure stage with very high guidance capability, an optimized metrology loop and a specific design with four differential dual-pass interferometer that provide an Abbe error below 1nm for the whole measuring volume.

Paper Details

Date Published: 14 May 2010
PDF: 8 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180U (14 May 2010); doi: 10.1117/12.854201
Show Author Affiliations
Benoit Poyet, Lab. National de Metrologie et d'Essais (France)
Lab. d'Ingénierie des Systèmes de Versailles (France)
Sébastien Ducourtieux, Lab. National de Metrologie et d'Essais (France)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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