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Proceedings Paper

Fabrication of regular patterned SERS arrays by electron beam lithography
Author(s): U. Huebner; H. Schneidewind; D. Cialla; K. Weber; M. Zeisberger; R. Mattheis; R. Moeller; J. Popp
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Paper Abstract

Due to its enormous signal intensity and high fingerprint sensitivity, surface enhanced Raman spectroscopy (SERS) is a powerful technique in chemical and biological applications. Our goal is the employment of the SERS technique for (bio)analytical devices. A main feature in order to achieve a versatile applicability is to ensure a reproducible and homogeneous signal across large measuring areas. Electron beam lithography is an adequate approach to assemble such reproducible arrays. Within this contribution, the fabrication process of regular patterned nanostructures based on electron beam lithography and argon ion beam etching is described. Using the exposure of crossed gratings of lines within a resist layer, gold nanorhomb and nanorectangle arrays are produced on a quartz wafer. The patterns are periodically arranged with pitches of 200 to 400 nm and exhibit sharp edges with corner radii of less than 10 nm. The pattern dimensions in combination with the small edge radii yield a high electromagnetic field enhancement caused by plasmonic excitation. The SERS arrays were characterized by means of SEM and were tested with respect to their SERS response, especially with regard to their reproducibility.

Paper Details

Date Published: 28 April 2010
PDF: 7 pages
Proc. SPIE 7715, Biophotonics: Photonic Solutions for Better Health Care II, 771536 (28 April 2010); doi: 10.1117/12.854184
Show Author Affiliations
U. Huebner, IPHT Jena (Germany)
H. Schneidewind, IPHT Jena (Germany)
D. Cialla, Friedrich-Schiller-Univ. Jena (Germany)
K. Weber, Friedrich-Schiller-Univ. Jena (Germany)
M. Zeisberger, IPHT Jena (Germany)
R. Mattheis, IPHT Jena (Germany)
R. Moeller, Friedrich-Schiller-Univ. Jena (Germany)
J. Popp, IPHT Jena (Germany)
Friedrich-Schiller-Univ. Jena (Germany)

Published in SPIE Proceedings Vol. 7715:
Biophotonics: Photonic Solutions for Better Health Care II
Jürgen Popp; Wolfgang Drexler; Valery V. Tuchin; Dennis L. Matthews, Editor(s)

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