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Characterization and inspection of micro-lens array by SCBS microscope
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Paper Abstract

Micro optics characterization by use of digital holographic microscopy (DHM) is proposed recently. DHM can provide phase image and very suitable for the quantitative mapping of transmission material with a certain refractive index. However, it has been found that in DHM the microscope objective introduces a spherical phase curvature to the object wave which may disturb the measurement especially for the micro-lens array. We present single lens characterization and uniformity inspection of micro-lens array by use of a new concept DHM system developed recently. The new concept DHM is based on a single cube beam-splitter (SCBS) configuration using an MO to provide high resolution on the test specimen. The SCBS is put into the optical path with a small angle between the optical axis and its central semireflecting layer. In this way, light is split into two parts when in and combined to form two holograms when out of SCBS. For the symmetrical configuration of the beam splitter cube, the spherical phase curvature introduced by the MO can be physically compensated during interference. Because no separated light propagation outside the SCBS, the whole system is insensitive to vibration. As light coming out of the MO serves not only the object beam but also the reference beam, it enables the inspection of the uniformity across a whole micro-lens array. Geometrical characterisation of the shape and surface roughness of micro-lens is given as well as the uniformity analysis across the whole array.

Paper Details

Date Published: 14 May 2010
PDF: 6 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180P (14 May 2010); doi: 10.1117/12.854121
Show Author Affiliations
Weijuan Qu, Ngee Ann Polytechnic (Singapore)
Oi Choo Chee, Ngee Ann Polytechnic (Singapore)
Yingjie Yu, Shanghai Univ. (China)
Hooi Leng Ng-Lee, Ngee Ann Polytechnic (Singapore)
Ailing Tian, Xi'an Technological Univ. (China)
Anand Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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