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Proceedings Paper

Micro-optical elements functioning in non-visible spectral range
Author(s): Qin Wang; Andy Z. Z. Zhang; Andreas Bergström; Vicky Z. J. Huo; Susanne Almqvist; Wlodek Kaplan; Jan Y. Andersson
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Paper Abstract

Nowadays novel micro-fabrication and wafer-based manufacturing approach allows realizing micro-optics in a way scientists have dreamt for generations, in particular, utilizing nano-imprint lithography as fabrication tooling enables greatly accelerating the micro-optics technology to its frontier. In this report, we present wafer-scale fabrication of various types of micro-optical elements based on photoresist, benzocyclobutene, photocurable imprint resist, and semiconductor materials by using thermal reflow, reactive ion etching, and imprint techniques. Especially, several concave or convex 3-dimensional micro-optical structures shaped by imprint method are detailed. These micro-optical elements can be monolithically or hybrid integrated onto optoelectronics devices, such as photodetectors and emitters as optical beam focuser, collimator, filter, or anti-reflectance elements. As application examples, polymer microlenses were integrated directly on the top of UV dual functional devices and quantum dot long wavelength infrared photodetectors, respectively.

Paper Details

Date Published: 12 May 2010
PDF: 9 pages
Proc. SPIE 7716, Micro-Optics 2010, 771609 (12 May 2010); doi: 10.1117/12.853959
Show Author Affiliations
Qin Wang, Acreo AB (Sweden)
IMAGIC Ctr. (Sweden)
Andy Z. Z. Zhang, Acreo AB (Sweden)
IMAGIC Ctr. (Sweden)
Andreas Bergström, Acreo AB (Sweden)
IMAGIC Ctr. (Sweden)
Vicky Z. J. Huo, Acreo AB (Sweden)
IMAGIC Ctr. (Sweden)
Susanne Almqvist, Acreo AB (Sweden)
IMAGIC Ctr. (Sweden)
Wlodek Kaplan, Acreo AB (Sweden)
IMAGIC Ctr. (Sweden)
Jan Y. Andersson, Acreo AB (Sweden)
IMAGIC Ctr. (Sweden)


Published in SPIE Proceedings Vol. 7716:
Micro-Optics 2010
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Hans Zappe, Editor(s)

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