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Proceedings Paper

Test objects for calibration of SEMs and AFMs operating at the nanoscale
Author(s): V. P. Gavrilenko; Yu A. Novikov; A. V. Rakov; P. A. Todua
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Paper Abstract

Test objects for calibration of scanning electron microscopes (SEMs) and atomic force microscopes (AFMs) operating in the nanometer range are analyzed. All the test objects can be divided into three groups: (a) structures with right-angled profiles; (b,c) structures with trapezoidal profiles and small/large angles of sidewalls inclination. Calibration methods for SEMs and AFMs, based on such structures, are presented. Structures with trapezoidal profiles and large angles of sidewall inclination offer the most broad range of calibration opportunities for SEMs and AFMs.

Paper Details

Date Published: 14 May 2010
PDF: 12 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180Y (14 May 2010); doi: 10.1117/12.853892
Show Author Affiliations
V. P. Gavrilenko, Ctr. for Surface and Vacuum Research (Russian Federation)
Moscow Institute of Physics and Technology (Russian Federation)
Yu A. Novikov, Moscow Institute of Physics and Technology (Russian Federation)
A. M. Prokhorov General Physics Institute (Russian Federation)
A. V. Rakov, Ctr. for Surface and Vacuum Research (Russian Federation)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russian Federation)
Moscow Institute of Physics and Technology (Russian Federation)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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