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Proceedings Paper

Design of active lens for VCSEL collimation
Author(s): B. Reig; T. Camps; D. Bourrier; E. Daran; C. Vergnenegre; V. Bardinal
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Paper Abstract

Active control of VCSELs beam properties is a key issue to improve their integration in microsystems. We have designed a micro-optical system that allows for a dynamic displacement of the VCSEL beam. It consists of a polymer microlens associated to a SU-8 membrane vertically moved by means of a thermal actuator. This approach is suitable with laser sources arrays. We present results on optical design demonstrating that a small deflection of the membrane (2μm) could lead to a large displacement of the beam waist vertical position (in the millimetric range). Thermomechanical modelling is performed to evaluate the maximum membrane displacement achievable with this system. Finally, first feasibility results are presented.

Paper Details

Date Published: 13 May 2010
PDF: 8 pages
Proc. SPIE 7716, Micro-Optics 2010, 771620 (13 May 2010); doi: 10.1117/12.853889
Show Author Affiliations
B. Reig, Lab. d'Analyse et d'Architecture des Systèmes (France)
Univ. de Toulouse (France)
T. Camps, Lab. d'Analyse et d'Architecture des Systèmes (France)
Univ. de Toulouse (France)
D. Bourrier, Lab. d'Analyse et d'Architecture des Systèmes (France)
Univ. de Toulouse (France)
E. Daran, Lab. d'Analyse et d'Architecture des Systèmes (France)
Univ. de Toulouse (France)
C. Vergnenegre, Lab. d'Analyse et d'Architecture des Systèmes (France)
Univ. de Toulouse (France)
V. Bardinal, Lab. d'Analyse et d'Architecture des Systèmes (France)
Univ. de Toulouse (France)


Published in SPIE Proceedings Vol. 7716:
Micro-Optics 2010
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Hans Zappe, Editor(s)

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